Abstract
In semiconductor back-end production, the die attach process is one of the most critical steps affecting overall productivity. Optimization of this process can be modeled as a pick-and-place problem known to be NP-hard. Typical approaches are rule-based and metaheuristic methods. The two have high or low generalization ability, low or high performance, and short or long search time, respectively. The motivation of this paper is to develop a novel method involving only the strengths of these methods, i.e., high generalization ability and performance and short search time. We develop an interactive Q-learning in which two agents, a pick agent and a place agent, are trained and find a pick-and-place (PAP) path interactively. From experiments, we verified that the proposed approach finds a shorter path than the genetic algorithm given in previous research.
Highlights
The entire semiconductor manufacturing process can largely be divided into two sequential subprocesses of front-end production and back-end production
As for the running time, the proposed model and rulebased models take less than a second, but genetic algorithm (GA) takes more than an hour to yield a path and is highly dependent on the number
We addressed the PAP problem of the die attach process to maximize the overall productivity in semiconductor back-end production
Summary
The entire semiconductor manufacturing process can largely be divided into two sequential subprocesses of front-end production and back-end production Both production processes involve many complicated steps for wafer fabrication, probe testing and sorting, assembly, final testing, etc. In back-end production, based on quality and location information of individual chips (die) derived from the EDS test, only good semiconductor chips are individually picked and attached to the support structure (e.g., the lead frame) on a strip by an automatic robot arm. This process is called the die attach process [2]. Optimization of the die attach process is important to maximize the overall productivity in semiconductor back-end production
Published Version
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