Abstract

Fabrication and functional performance of highly sensitive ultraviolet detectors based on zinc oxide (ZnO) thin film SAW device and a ZnO/LiNbO 3 layered structure is described. A 37 MHz bulk LiNbO 3 surface acoustic wave (SAW) filter with a 71 to 200 nm-thick ZnO over layer exhibits a downshift in the frequency with ultraviolet (UV) light due to acoustoelectric interactions between the photo-generated carriers in the semiconducting ZnO over layer and the surface acoustic waves. In contrast, a 36 MHz ZnO thin film SAW delay-line fabricated on a 8 μ m thick insulating ZnO film exhibited an upshift in the frequency. A linear change in frequency shift with UV intensity is found useful for the fabrication of wireless UV sensors.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.