Abstract
Fabrication and functional performance of highly sensitive ultraviolet detectors based on zinc oxide (ZnO) thin film SAW device and a ZnO/LiNbO 3 layered structure is described. A 37 MHz bulk LiNbO 3 surface acoustic wave (SAW) filter with a 71 to 200 nm-thick ZnO over layer exhibits a downshift in the frequency with ultraviolet (UV) light due to acoustoelectric interactions between the photo-generated carriers in the semiconducting ZnO over layer and the surface acoustic waves. In contrast, a 36 MHz ZnO thin film SAW delay-line fabricated on a 8 μ m thick insulating ZnO film exhibited an upshift in the frequency. A linear change in frequency shift with UV intensity is found useful for the fabrication of wireless UV sensors.
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