Abstract
The frequency response of a 37 MHz bulk LiNbO3 surface acoustic wave (SAW) filter with a 200-nm-thick ZnO overlayer exhibited a downshift in the frequency with ultraviolet (UV) light due to acoustoelectric interactions between the photo-generated carriers in the semiconducting ZnO and the surface acoustic waves. In contrast, a 36 MHz ZnO thin film SAW delay-line with insulating ZnO films exhibited an upshift in the frequency. The response was more pronounced at higher harmonics (130–315 MHz) and was attributed to changes in the elastic/dielectric properties in the upper surface layer of ZnO. A linear change in the frequency with UV intensity shows immense applicability for wireless ultraviolet sensor applications.
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