Abstract
Novel gas-sensing devices based on a porous Pt-SnO2 metal-oxide-semiconductor field-effect transistor (MOSFET) for carbon monoxide (CO) gas sensing have been fabricated. The structure integrates the catalytic properties of porous Pt, a thin catalytic layer, and the spillover effect onto SnO2, a gas adsorptive oxide, with surface-sensitive MOSFETs. The operation characteristics of the device for the detection of CO are presented as a function of CO gas concentration and operating temperature. The threshold voltage decreased rapidly with time when the device was exposed to CO gas. It was possible to detect 54 ppm of CO gas with a response time of less than 1 min at an operating temperature of 27°C. A model was proposed to explain the operation. The proposed sensing mechanism of the device is supported well by experimental data.
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