Integration of Mid-Infrared Light Sources on Silicon-Based Waveguide Platforms in 3.5–4.7 μm Wavelength Range

Abstract

Mid-infrared light sources are attracting attention for use in spectroscopic sensing, thermal imaging, and infrared countermeasures. Integration of these sources on Si-based waveguides allows for more functional and complex photonic circuits to be integrated on a single chip. This paper focuses on the key aspects of this integrated platform. The operation of silicon-on-insulator waveguides beyond 4.0 μm wavelength with increasing waveguide core thickness is discussed, and the effects of various cladding materials on waveguide propagation loss is demonstrated. Low loss waveguides and Mach-Zehnder interferometers in Ge-on-Si waveguide platform are discussed and beam combiners in the form of arrayed waveguide gratings are demonstrated in both the platforms. Interband cascade lasers are integrated on silicon-on-insulator waveguides with direct bonding to realize Fabry-Perot lasers. Power scaling of integrated lasers is validated by integrating quantum cascade lasers with silicon-on-insulator beam combiners. Results for the first integrated Fabry-Perot quantum cascade lasers on Ge-on-Si waveguides are discussed, together with the potential use of these waveguides to provide a better heat sink for integrated mid-infrared light sources.