Abstract
The paper concerns the problems associated with the generation and measurement of vacuum in small-volume microelectromechanical (MEMS) devices. A concept of equipping vacuum MEMS with miniature vacuum pump and gauge has been presented. The ion-sorption vacuum micropump developed by the authors has been integrated with two “external” miniature pressure sensors: a specially developed miniature Bayard-Alpert gauge and a MEMS-type Pirani sensor. The pressure during the pumping process was in-situ measured and co-work of vacuum micropump and sensors has been investigated. The experimental results confirmed good pumping properties of the micropump, but indicated that the work of micropump significantly affects the operation of vacuum sensors and vice versa.
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