Abstract
Corrugated diaphragms (CDs) have been widely used in many fields because of their higher pressure sensitivity and wider linear range compared to flat diaphragms (FDs) in the same circumstances. Especially in the application of miniature fiber-optic pressure sensors, the introduction of the corrugated structure gives the sensor high sensitivity, large dynamic range, good linearity, small hysteresis, good stability, and so on. Research on CD-based miniature fiber-optic pressure sensors has gradually attracted more attention in recent years. In this paper, the principles of operation of a miniature fiber-optic pressure sensor are briefly introduced, then the mechanical properties of FD and CD, as well as their influences on the performance of the sensor, are analyzed in detail. The application status of CDs in miniature fiber-optic pressure sensors is reviewed, and our conclusions and the prospects for the application of CDs in miniature fiber-optic pressure sensors are given finally.
Highlights
Pressure sensors are widely used in many fields of life
For the extrinsic fiber-optic pressure sensor the optical fiber is only used as a light guide element and the sensing of the pressure will be realized by an external pressure sensitive diaphragm
The shallow corrugated structure can reduce the influence of the initial stress to improve the mechanical performance sensitivity of the diaphragm and increase the linear range of the diaphragm; the single deeply corrugated diaphragm (SDCD) structure can improve the mechanical sensitivity of the diaphragm by releasing the initial stress and reducing the bending stiffness
Summary
Pressure sensors are widely used in many fields of life. The applications of pressure sensors can be divided into static pressure sensors (such as atmospheric pressure or hydrostatic pressure) and dynamic pressure (such as acoustic pressure) sensors. Compared with the traditional electronic pressure sensors, the fiber optic pressure sensors enjoy the advantages of high sensitivity, wide frequency response, large dynamic range and strong anti-electromagnetic interference, along with small size, light weight and miniaturization. Due to the flexibility of the diaphragm’s structural design, the diaphragm-based fiber-optic pressure sensor has attracted widespread attention. Structure, usually formed by two interference beams sharing a common optical path, is insensitive to the disturbances in the transmission fiber, and is widely used in pressure sensing. The application of CDs in miniature fiber-optic pressure sensors has been developing rapidly [17,18,19,20,21,22,23,24,25,26,27]. Problems and to explore the potential application of CDs in miniature fiber-optic pressure sensors.
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