Abstract
We present an integrated beam steering system with a microlens scanner and a vertical cavity surface-emitting laser (VCSEL) source. The scanner and the VCSEL are assembled with an alignment sphere process and with an accuracy of 121 ±7 μm defined by precision microspheres. The microlens scanner employs an electrostatic comb-drive actuator with prebent springs to extend the maximum displacement to 83 μm; 60% larger than that with standard folded springs. This translates to an angular scan range of ±9.6° with the double sided comb-drive scanner. The mechanical resonance with lens is measured to be 236 Hz.
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