Abstract
This paper reports on the design, fabrication and optical characterization of a self-aligned microlaser scanning system consisting of a vertical cavity surface emitting laser (VCSEL) source and a MEMS-actuated microlens scanner. The alignment and the spacing between the VCSEL and the MEMS scanner are achieved through lithographically patterned alignment grooves and precision micro-beads. Horizontal displacements of ±70 μm, corresponding to scanning angles of ±7°, have been demonstrated.
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