Abstract
A novel system of integrated thin-film heater with an embedded thermocouple was developed. Thin-film metallic heaters are widely used today in various fields of electronics and microelectronics applications. The main goal of the heater is usually to maintain the temperature in the heated zone. A deterministic method to manufacture an in situ heater––thermocouple system, with a pre-determined heater resistance, to give a required heat power, was developed. In order to examine this novel method, thin-film heaters were made using layers of Al and NiCr alloys. The temperature of the thin-film heater was measured while heating by an embedded thin-film thermocouple, positioned in the vicinity of the heater. This thin-film thermocouple system consisted of Ni–Ag alloy. A precise control of the growing heater film, while deposition, became possible using a simultaneous measurement of the heater sample resistance.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
