Integrated Subwavelength Gratings on a Lithium Niobate on Insulator Platform for Mode and Polarization Manipulation (Laser Photonics Rev. 16(7)/2022)

Abstract

Subwavelength Gratings In article number 2200130, Yonghui Tian and colleagues experimentally demonstrate compact subwavelength grating (SWG) waveguides on a LNOI platform for on-chip mode and polarization manipulation. To overcome the limitation of direct etching waveguide fabrication, a silicon nitride thin film was deposited onto the surface of LNOI chip, where the SWGs were formed using CMOS-compatible etching processes developed by microelectronics industry.