Integrated RF MEMS phase shifters with constant phase shift

Y.J Ko,J.Y Park,J.U Bu

doi:10.1109/mwsym.2003.1210418

Integrated RF MEMS phase shifters with constant phase shift

Y.J Ko, J.Y Park + Show 1 more

https://doi.org/10.1109/mwsym.2003.1210418

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Publication Date: Jun 8, 2003

Citations: 14

Affiliation: LG Corporation (South Korea)

#Constant Phase Shift #RF MEMS Capacitive Shunt Switches + Show 8 more

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Abstract

In this paper, fully integrated RF MEMS phase shifters with low insertion loss, narrow frequency band, and constant phase shift are designed, fabricated, and characterized for mobile satellite broadcasting/communication systems. The fabricated phase shifters are comprised of CPW lines, short/open ended-stubs, and RF MEMS capacitive shunt switches. The constant phase shift can be obtained by optimizing the length of the open-ended stub and the short-ended stub. The fabricated 3-bit phase shifter has insertion loss of avg. -2.0 dB, return loss of min. -10 dB, and phase error of avg. 2.0/spl deg/, respectively. The utilized RF MEMS switches are operated at between 15 and 20 volts.

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