Abstract
In this paper, a fully integrated five-bit RF MEMS phase shifter with low insertion loss, narrow frequency band, and constant phase shift is designed, fabricated, and characterized for mobile satellite broadcasting/communication systems. The integrated five-bit phase shifter is comprised of CPW lines, air-gap overlay CPW couplers, and MEMS capacitive shunt switches. Phase shift can be obtained by changing the length of the short-ended stub with the MEMS switch, and the constant phase shift can be obtained by using the open-ended stub. The fabricated 5-bit phase shifter has insertion loss of avg. -5.25 dB, return loss of min. -10 dB, and phase error of avg. 3.5/spl deg/, respectively. The utilized RF MEMS switches are operated at between 15 and 20 volts.
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