Abstract
A recent report by the authors presented theoretical studies of a new method of interrogation of the position of arrays of micro-electro-mechanical system (MEMS) cantilever and doubly clamped beams. This letter represents the first experimental evidence of the performance of such an interrogation technique, confirming the modelling and showing noise performance close to the theoretical predictions. Such a technique will be useful in applications such as MEMS-based chemical sensing. Our experimental results show the potential to realize a shot-noise limited component of minimum detectable deflection of 16 <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">${\rm fm}/\sqrt{\rm Hz}$</tex></formula> .
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
