Abstract
A cantilever-based oscillating type MEMS dc current sensor integrated with actuating and sensing piezoelectric plates and a micromagnet was proposed for measuring electricity consumption in a single-wire or two-wire appliance cord. A prototype MEMS dc current sensor, with a resonant frequency of 32 Hz, was microfabricated and characterized. In the case of a two-wire electrical appliance cord, it was found that the relative change in the maximum value of the output voltage is approximately proportional to the applied dc current. The output voltage increased from 0 to 10 mV when the dc current was increased from 0 to 2 A under an excitation voltage of 6 Vpp. At the same time, the resonant frequency shift of the cantilever was observed to be monotonically increased over the applied dc current both theoretically and experimentally. In summary, the proposed MEMS dc current sensor was demonstrated to measure the output voltage constantly and nearly linearly over the applied dc current in a two-wire appliance without using a cord separator.
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