Abstract
Repeater ICs for a high-speed optical submarine transmission system are integrated on five monolithic chips using a Si shallow junction bipolar process with 7 GHz f <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</inf> . To achieve high reliability, a two-level metailization system using Cu-doped Al and Au/Pt/Ti with TiN diffusion barriers is employed. The gain (s <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">21</inf> ) and bandwidth of the equalizing amplifier IC are 65 dB and 300 MHz, respectively. The timing amplifier IC phase deviation is kept within 10°. The decision IC sensitivity is less than 6 mV. These results fully satisfy performance requirements for repeater ICs.
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