Integrated optical interferometric detection method for micromachined capacitive acoustic transducers

Abstract

An integrated optical interferometric detection method for micromachined capacitive acoustic transducers is reported. The back electrode of the capacitive transducer on a transparent substrate is shaped as an optical diffraction grating and the displacement of the transducer membrane is determined with interferometric resolution by measuring the intensity of the reflected diffraction orders. By applying voltage to deflect the membrane electrostatically, the detection sensitivity is kept at the optimum level and transmission signals are generated. Initial experiments on devices microfabricated on quartz substrates show a minimum detectable displacement of 2×10−4 Å/√Hz around 250 kHz and low frequency detection capability for microphone applications. Ultrasonic pulse-echo experiments in air at 750 kHz are also demonstrated using both a HeNe laser and a 850 nm vertical cavity surface emitting laser as the light source.