Integrated MOEMS based cantilever sensor for early detection of cancer

Abstract

In this paper, we present a novel microcantilever sensor for early detection of cancer in human body using an integrated optical micro ring resonator. Effect of geometrical modification of microcantilever on sensitivity and quality factor of proposed sensor is investigated. Regular rectangular and triangular profile are the two types of microcantilever considered during the analysis. The concept of integration of triangular and regular rectangular microcantilever profile with six hexagonal ring with hexagonal lattice configuration is novel work considered here. Finite element method simulation were carried out to obtain the surface stress of microcantilever and finite difference time domain method are used to obtain the transmission characteristics of photonic resonator structure. Range of pressure exerted on microcantilever due to binding of carcino embryonic antigen molecules on surface microcantilever is calculated as 0–2 MPa for specific number of molecules. High resolution with high quality factor 11,458 and pressure sensitivity of 60 nm/MPa is obtained for triangular microcantilever profile. Regular rectangular microcantilever has shown sensitivity of 0.01 nm/MPa and maximum quality factor of 3805. Both the sensor configuration has shown transmission efficiency above 90%. Thus a novel photonic resonator based microcantilever sensor configurations shows a promising linear characteristic as MOEMS sensor.