Abstract
The design and fabrication of a gas-phase microreactor that is based upon a multilayer laminate microelectronics structure is described. The reactor is a key component in an integrated system whose platform utilizes a commercial computer chassis with modular boards to perform the required process functions. The design combines knowledge from earlier laminate microstructures with new prototyping concepts for incorporation of various on-board devices. A 3-D finite element simulation model was used to identify various design improvements. The final device contains two parallel reaction channels on a chiplike die in which a 1 μm platinum film catalyst is deposited on the underside of a silicon nitride membrane. Seven platinum heaters and temperature sensors are evenly distributed along the top side of the silicon nitride membrane. Electrical contacts for the on-board control and sensing devices are achieved through various pins that are distributed around the reactor die. The experience and knowledge gained i...
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