Abstract
An integrated instrumentation amplifier combined with a bandpass filter has been fabricated in a bipolar process for the phase readout of piezoresistive sensors. Changes in the resistance can be measured directly using an ac-operated bridge configuration. A special technique has been employed to convert these changes into a phase angle relative to the excitation signal. The instrumentation amplifier should have a very high Common-Mode Rejection Ratio (CMRR) at a relatively high bridge operating frequency (100 kHz) in order to actually exploit the advantages of this readout method. The filter should have a well-determined phase behavior to prevent a change in the frequency from affecting the output phase angle. Special emphasis has been placed on the compatibility between micromachining technologies in silicon and bipolar processing, so that a fully integrated smart silicon micromechanical sensor can be made.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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