Abstract
An integrated hybrid Mach-Zehnder (MZ) interferometer based on femtosecond laser micromachining for simultaneous measurement of seawater temperature and salinity was proposed. Two microcavities were machined on the multimode fiber (MMF) using a femtosecond laser to form a three-beams MZ interferometer and used to measure seawater temperature and salinity. The simulation results showed that the response of the sensor to temperature and salinity was only affected by the length of the microcavity, and the depth of the microcavity responded to the structural strength of the sensor. The experimental results showed that the temperature sensitivity of the sensor was 4.401 nm/℃ in the temperature range of 5 ∼ 40 ℃, and the salinity sensitivity was 0.784 nm/‰ in the salinity range of 3.52 ‰ ∼ 59.41 ‰. The sensor had the advantages of high sensitivity and integration, which was expected to be applied in the measurement of seawater multi-parameters.
Published Version
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