Abstract
The Atomic Resolution Microscope (ARM) is one of two unique high voltage electron microscopes at the Lawrence Berkeley Laboratory's National Center for Electron Microscopy (NCEM). This paper reports on the latest results from this new instrument which was manufactured by JEOL, Ltd. to the performance specifications of the NCEM, delivered in January of 1983, and soon to be open to access by the entire microscopy community. Details of its history and development are given in reference 1; its performance specifications are reviewed below.Adopting as a design definition for resolution the first zero crossover of th% phase contrast transfer function at Scherzer defocus, the ARM (Fig. 1) maintains 1.7Å point-to-point resolution over its 400kV to 1000kV operating range. Consequently the microscope can be tuned to a voltage which is below the threshold for knock-on damage in a specimen and used to directly image its contiguous-atom structure. The key to this variable-voltage, high-resolution performance is a top-entry objective stage, which, in addition to ± 40° biaxial tilting, incorporates a height (Z)-control to alter specimen position within the objective lens.
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More From: Proceedings, annual meeting, Electron Microscopy Society of America
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