Abstract

In 2009 Carl Zeiss stopped the manufacture of precision gratings. All users of their gratings were very concerned about this decision, since they all need precision gratings for their experiments. One of the institutes of the HZB, the Institute for Nanometer Optics and Technology (INT), has extensive experience in micro fabrication (technology group). In spring 2010, HZB decided to take over the old C. Zeiss grating fabrication and build up its own technology center for grating fabrication. In March 2010, the INT applied to the Senate of Berlin for funding for our project from the European Regional Development Fund (ERDF). In October 2010, HZB received an approval of its application from the Senate of Berlin (contract No 20072013 2/43). Using this governmental support, HZB will install all necessary equipment and processes to fulfill these demands until end of 2013.

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