Abstract
This paper presents the nanorobotic resistance spot welding (RSW) of ultra-thin film three-dimensional helical nanobelts(HNBs) for the assembly of nanoelectromechanical systems (NEMS) from as-fabricated building blocks. Three-dimensional HNBs with metal pads firstly placed onto as-fabricated micropipette electrode. using nanorobotic manipulation, then fixed with RSW. The spot-welded structures are then electro-mechanically characterized to show the ohmic conductivity and electromechanical stability. Experiments show that RSW can enable stable ohmic contacts with sufficient mechanical strength for constructing devices such as force sensors from HNBs.
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