Abstract
Electromigration (EM) void nucleation and growth is a failure mechanism of integrated circuit (IC) metallization. The time-to-failure of interconnect lines depends on the void nucleation time and the void growth time. While much work has been done to model the void nucleation stage, the current understanding of the void growth stage is minimal. Characterizing the void growth and interaction dynamics is essential to further explaining EM performance of IC interconnects.
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