Abstract

Innovative algorithms and software evaluating the three-dimension topography in laser micro-machining are developed in this paper. First according to the features of the three-dimension surface consisted of micro peaks and pits, Gaussian curve parameters are presented and used to form a evaluation system with 22 parameters for three-dimension topography. Based on this, to completely and precisely evaluate the three-dimension topography,an assessment module for power spectral density is designed and implemented. Through integrating this module with the 22 parameters, a complete and precise evaluation system is built, which can evaluate the performance not only in vertical direction but also in horizontal is obtained. In software, through using MATLAB/GUI latest interface to implement integration, the following functions are implemented: surface three-dimension topography rebuilding, signal noise reducing, assessment data extracting, roughness calculating, and two-dimensional frequency domain analyzing. Furthermore, with this software, through comparing the parameters and spectrum, it is easy to determine the frequency affecting the roughness,thus providing some clues on how to further reduce the surface roughness. Test results show that this software system can provide more accurate assessment for the surfac three-dimension topography, and can be used to ultra-precision machining surface assessment.

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