Innovations in Thin Film Processing and Characterisation

Abstract

This special issue contains selected papers which were presented as invited orcontributed communications at the 4th International Conference on Innovation in Thin FilmProcessing and Characterization (ITFPC'09) which was held on 17-20 November, 2009 inNancy (France)Jointly organized by the French Vacuum Society and the Institut Jean Lamour–a jointresearch unit specialized in materials, metallurgy, nano-sciences, plasmas and surfaces–theITFPC conferences aim at providing an open forum to discuss the progress and latestdevelopments in thin film processing and engineering.Invited lectures aim particularly at providing overviews on scientific topics whilecontributed communications focus on particular cutting-edge aspects of thin film science andtechnology, including CVD, PVD and ion beam assisted processes. The 2009 conference wasorganized along the 6 main following topics: Thin films processing and surface engineering Numerical simulation and thin film characterization Protective applications of thin films Energy, environment and health applications of thin films Micro- and nano-patterning of thin films New properties and applications resulting from patterned thin films which were completed by a special half day session devoted to industry-supported innovation.180 scientists from 20 worldwide countries attended the different sessions along with the 9invited lectures and 130 contributions were given.Besides the outstanding scientific program, a half-day tutorial session preceded theconference. During the short courses, emphasis was laid on: Lithography for thin film patterning Mechanical properties of thin films Principles and applications of reactive sputtering processes. The French Vacuum Society granted financial aid to PhD students who applied for itin order to encourage the participation of young scientists.The 19 papers published in this volume were accepted for publication after peerreviewalas for regular papers. As chairmen of this conference, we gratefully acknowledge allreferees for their valuable work sometimes with a rather short delay.We also express our gratitude to the international members of the scientific committeewho actively contributed to ensure an attractive program in proposing invited speakers; it wasa difficult task for them to select only 9 out of the large number of proposed recognizedexperts.Finally, ITFPC'09 would not have been successful without the strong involvement andimplication of the local organizing committee and the support of our partners. They will allfind here our sincere thanks. Gérard Henrion, Mohammed Belmahi and Stéphane Andrieu Co-chairmen of the ITFPC-09 Conference.