Abstract
The synthesis of metal foils with unique surface features such as waves and steps is of interest for use as payloads in targets for laser-driven physics experiments under dynamic loading conditions. Changes to the surface features are used to quantify the effects of the material strength during the deformation at high-strain rate high pressure. A traditional path to produce these target features is by precision machining processes using diamond tools. Limitations are encountered since many of the materials of interest and the size of the surface features are not often compatible with conventional machining-process methods. An alternative method to produce targets with unique surface features is through vapor synthesis. Two general approaches are taken—one is by replicating the features from the surface of a substrate mandrel, whereas the second is by using hard masks with timed exposure to the deposition vapor. In these approaches, postdeposition removal of a release layer yields a free-standing target with the desired surface features. Specific cases are presented for the physical vapor deposition of copper, aluminum, iron, vanadium, and tantalum to form targets with multiple layers, steps, and sinusoidal surface waves.
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More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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