Abstract
High resolution inkjet printing was applied to the site control of the anodic tunnel etching of Al. In this method, a dot array of polymer resin was formed on Al(100) by inkjet printing and was transferred to the oxide layer by anodization. The anodic etching of Al with a mask in a HCl electrolyte resulted in the site-controlled initiation of the tunnel etching of Al and the uniform tunnel pits with high aspect ratio. The interval of the tunnel pits could be successfully controlled by the inkjet patterning on the micrometer scales.
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