Initial stages of oxidation of Si{100}(2 × 1): A combined vibrational (EELS) and electron binding energy (XPS) study

Abstract

Abstract High resolution electron energy loss spectroscopy (EELS) and X-ray photoelectron spectroscopy (XPS) have been used to characterize the initial stages of chemisorption and/or oxidation on Si(100)2 × 1 between 300 and 1000 K at coverages below 1.5 monolayers. The EELS spectra are discussed comparatively in terms of an augmented central-force model and of localized vibrations of Si/O/Si complexes.