Abstract
The deposition process of ultra-thin Co and Pd layers is studied using DC magnetron sputtering and ex situ atomic force microscopy (AFM). It is found that observation with AFM in the air atmosphere is reliable to discuss nucleation of Co and Pd crystallites. It is discussed that a Co ultra-thin layer is formed primarily through the process of two-dimensional island formation, whereas a Pd ultra-thin layer is formed through the process of mixed two- and three-dimensional island formation. On the basis of those results, Co/Pd multilayers having a flat top surface are prepared successfully.
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