Abstract
InGaAsP epilayers and InGaAsP/GaInP single quantum well (SQW) structures have been grown by metalorganic chemical vapor deposition (MOCVD) on GaAs substrates using tertiarybutylphosphine (TBP) and tertiarybutylarsine (TBAs) as group V sources. Both InGaAsP epilayers and InGaAsP/GaInP SQW structure show strong photoluminescence emission, suggesting good optical quality. Finally, ridge waveguide InGaAsP/GaInP/AlGaInP QW lasers have been demonstrated with an emission wavelength around 0.8 μm and a threshold current of 24 mA under continuous wave operation at room temperature, indicating TBP and TBAs are as good as PH 3 and AsH 3 for the growth of high-power 0.8 μm lasers.
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