Abstract
This paper discusses experimental and theoretical studies of the efficiency of optical coupling in GaAs/AlGaAs multiple-quantum-well-infrared photodetectors (QWIPs) via optical diffraction grating. Optical responsivity has been studied to compare the effectiveness of different grating structures fabricated by chemical wet and reactive ion etching (RIE) methods. By the unique measurement of infrared radiation transmission spectrum of the QWIP system, we have clearly demonstrated the optical interference effect in the GaAs/ AlGaAs active MQW layer and the potential utilization of the interference effect in designing and optimizing QWIP systems has been discussed. An optical grating processed by the RIE technique is advantageous due to its accurate control over the feature size of optical apertures.
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