Abstract
Nano texturing has been confirmed as an effective structure to improve the efficiency of multi-crystalline silicon solar cells by reducing optical loss. In this study, nano textured solar cells are fabricated by the Reactive Ion Etching (RIE) method based on a conventional production line. Several characterization methods are employed to evaluate the morphology, minority carrier lifetime, quantum efficiency and electricity performance of both nano textured and micro textured solar cells. The results show that nano textured solar cells have a maxiumum efficiency of 19.21 % and an average efficiency that is 0.57 % higher than that of micro textured solar cells. Thus, the RIE method is an effective way to manufacture nano textured solar cells. It can demonstrably improve the photoelectric conversion efficiency of mass-produced solar cells and reduce the production cost, which is significant to the development of solar cell industy. DOI: http://dx.doi.org/10.5755/j01.ms.24.2.17398
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