Abstract
A MEMS pyroelectric detector can be used as a pixel element in focal plane arrays of night vision cameras provided a significant rate of temperature change is available with the pyroelectric layer. The infrared heat transfer analysis intended for maximum thermal influence in pyroelectric layer is reported. The 3-D finite element modeling (FEM) is done by using COMSOL Multiphysics software. The device is simulated for different geometries to reduce the heat loss with substrate. The thickness of pyroelectric AlN and interconnected thin metal layer are being modulated for enhanced rate of temperature change. The simulation results designate that the IR detector mounted on diaphragm structure attains better temperature field as well rate of temperature change. In contrast of a bulk substrate mounted device.
Published Version
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