Abstract

Scanning Tunneling Microscopy (STM) gives information on the topography, chemical composition and electronic structure of metal and semiconductor surfaces down to the atomic scale. The experimental data can be filtered using a Wiener-type or least-square filter to eliminate blurring, to suppress noise, and, in addition, to correct spatial distortions by correlating typical picture elements. The three-dimensional profile of the processed surface picture can then be represented according to techniques developed by map-makers.

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