Abstract

One of the reasons why commercial application of surface acoustic wave (SAW) atomization is not possible is due to the condensation of aerosol droplets generated during atomization, which drip on the interdigitated transducer (IDT), thereby causing electrodes to short-circuit. In order to solve this problem, a SU-8-2002 film coating on an IDT is proposed in this paper. The waterproof performance of the film coating was tested on a surface acoustic wave (SAW) device several times. The experimental results reveal that the film coating was robust. The experiment also investigated the effects of the SU-8-2002 film on atomization behavior and heating.

Highlights

  • The generation of micron- and submicron-sized sprays is important for many industrial processes

  • Monodisperse aerosols with a controllable size are widely employed in many applications, such as fuel injection, agriculture sprays, mass spectrometry, ink-jet printing, and pulmonary drug delivery

  • Lang et al [2] used alternating signals to drive piezoelectric transducers, thereby generating ultrasonic and measured the droplet sizes from the breakup of the capillary wave on the liquid surface; they concluded that the droplet size was directly proportional to the wavelength of the capillary waves

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Summary

Introduction

The generation of micron- and submicron-sized sprays is important for many industrial processes. Guo et al (2015) investigated the ZnO SAW atomization device, which was excited with frequencies ranging from 37.2 MHz to 63.3 MHz, and found that a much higher power (>20 W) was required for atomization [13]. With such a large input power, it was difficult to miniaturize the RF source to be hand-held. The aerosol droplets generated during the atomization condensed in the air and dripped on the inter-digitated transducer (IDT), causing the electrodes to short-circuit [14,15,16,17,18,19,20,21,22,23] This is one reason prevented the commercial application of SAW atomization.

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