Abstract
In the current paper, the effect of van der Waals (vdW) force on the static behavior and pull-in characteristics of nano/micromirrors under capillary force is investigated. At first, the dimensionless equation governing the static behavior of nano/micromirrors is obtained. The dependence of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that the existence of vdW force can considerably reduce the stability limits of the nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the vdW force applied to the mirror. Finally, analytical tool Homotopy Perturbation Method (HPM) is utilized for prediction of the nano/micromirror behavior under combined capillary and vdW force. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. The results of this paper can be used for successful fabrication of nano/micromirrors using wet etching release process where capillary force plays a major role in the system.
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