Abstract
The influence of rapid thermal annealing (RTA) on the parameters of quartz resonators and their amplitude–frequency characteristics has been investigated. The resonators were an AT-cut quartz substrate with Al-electrodes 120 nm thick deposited by electron beam evaporation at 1.10 −5 mbar. The samples were subjected to RTA at the temperature of the heater 700°C, 800°C and 900°C for a time from 15 s to 180 s in vacuum at 5.10 −5 mbar. A correlation between the electrical parameters of the resonators and their amplitude–frequency characteristics from one side and RTA conditions from another side have been established. The conditions under which the quartz resonators parameters were improved have been found.
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