Abstract
A ceramic target based on cobalt doped SnO2 metal oxide was synthesized by the solid-phase reaction method. The target was used in the process of high-frequency magnetron sputtering. A thin SnO2:Co film was deposited, which is sensitive to hydrogen peroxide vapor. The current-voltage characteristics of the SnO2:Co sensor were measured in the presence of hydrogen peroxide vapor in the environment while ultraviolet light was exposed to the sensor at room temperature. It was shown that the sensitivity of the SnO2:Co film increases by about 1.6 times when exposed to ultraviolet rays.
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