Abstract
Traditional processes used for surface finishing such as polishing, grinding, finishing or laser irradiation could produce quite smooth surface. However, it is not convenient to apply these processes in micro manufacture due to the small size of product. In this study, micro forming process with presence of ultrasonic vibration was introduced for metal foils surface finishing. Influences of ultrasonic vibration on surface roughness were obtained at different conditions and a surface grain model was employed to clarify mechanism of improvement by ultrasonic. Results showed that surface roughness reduction is linear to ultrasonic vibration amplitude and static stress. The large surface roughness reduction was believed to have close relation with surface / total grain ratio, which is a function of dimension.
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