Influence of three-dimensional p-buried layer pattern on the performance of 4H-SiC floating junction Schottky barrier diode

Abstract

4H-SiC floating junction Schottky barrier diodes (FJ-SBDs) are excellent SiC devices with high Baliga’s figure of merit (BFOM). However, the p-type buried layers in epilayers partially obstruct the current paths, and increase the on-resistance, while the buried layers of dot patterns can reduce the obstruction. In this paper, a three-dimensional (3D) simulation of 4H-SiC FJ-SBDs with dot patterns is reported for the first time. By comparing the results obtained from stripe, square, octagon, and circle patterns, dot patterns are proved to be good choices for buried layers in 4H-SiC FJ-SBDs, and the FJ-SBD with the circle pattern has the highest BFOM of 12.09 GW/cm2, which is 22.62% greater than that of the FJ-SBD with the stripe pattern.