Abstract
The relationship between thickness and oxygen-sensing properties of TiO2 thin films on Al2O3 substrate is investigated. The results show that the properties of the films are influenced by both their substrate and thickness. When the thickness is less than 0.69 µm, the diffusion of Al3+ from the substrate plays the main roles in the appearance of p-type conductivity and very weak oxygen-sensing behavior. When the thickness is greater than 0.69 µm, the expected oxygen-sensing properties appear. Based on these results, the regularity of film resistance, oxygen sensitivity, response time, and consistency of these properties in relation to film thickness is investigated. The maximum oxygen sensitivity and consistency is reached at the optimal thickness of 2.3 µm.
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