Abstract
The intensity of x-ray propagation in surface layer materials characterized by a complex refractive index that changes continuously with depth was derived, and with use of the result, an analyzing method for evaluating the depth profiles of the strain distribution in the surface layer was studied. In this study, analyzing the incidence angle dependence of the scattered angles of diffracted x-rays from polycrystalline in surface layer with surface roughness, the depth profile of the strain in the surface layer is obtained. And, the influence of surface roughness in depth profile analysis of the strain distribution is studied.
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