Abstract

ZnS:Mn films were grown on Si (100) substrates via PLD technology at various substrate temperatures (from 20°C to 600°C). The structure, morphology and luminescent characteristics of ZnS:Mn films were studied by XRD, AFM and PL methods. The results show that, when the substrate temperature rises, the diffraction peak around 28.3° which belongs to the (111) crystal direction of cubic β-ZnS films becomes stronger, and the film surface changes from loose to dense, with the crystalline particles becoming larger. indicating that the crystallization quality of ZnS:Mn films is improved. In addition, the optical properties of ZnS:Mn are also greatly affected by the substrate temperature. As the substrate temperature rises, the average transmittance first increases and then decreases, with the optical band gap of the films becoming larger. In the PL spectra, the orange-red light at about 590 nm emitted by 4T1-6A1 of Mn2+ gradually enhances with the rise of substrate temperature, and the luminescence peak shifts blue.

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