Abstract
A series of FeNiN magnetic films with different substrate temperatures were fabricated using radio frequency magnetron oblique sputtering technology. The static and dynamic magnetic properties of samples were studied systematically. The results show that substrate temperature affects the magnetic properties of samples significantly. With the rise of substrate temperature, the coercivity of samples decreases firstly, and then increases when the substrate temperature is higher than 200 °C. The sample fabricated at 200 °C exhibits a well-defined in-plane uniaxial anisotropy and soft magnetic properties. Dynamic magnetic properties of samples were studied by using vector network analyzer and electron spin resonance. All of the results indicate that FeNiN film with good soft magnetic properties can be obtained at a substrate temperature of 200 °C.
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