Abstract
The morphology of nanocermet thin films deposited on substrateshaving different roughnesses has been studied by surface sensitive x-rayscattering techniques. Grazing incidence small angle scattering data of thefilms shows that the nanoparticles, which are present in the ceramic matrix,exhibit a specific average interparticle separation. Analysis of the x-rayreflectivity indicates that, in the films deposited on smooth substrates, thenanoparticles adopt some layering along the growth direction. This layeringtends to diminish with increasing substrate roughness and vanish completelyfor very high substrate roughness. The variation of such layering withsubstrate roughness is an indication that it starts close to the substrate andis an effect of the substrate boundary condition.
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