Influence of Structural Defects on the Electrophysical Parameters of pin-Photodiodes

Abstract

The results of studies of electrophysical parameters of pin-silicon-based photodiodes, depending on their operating modes (external bias and temperature), manufactured on single-crystal silicon wafers of p-type conduction orientation (100) with ρ = 1000 ohm cm, are presented. The p+-type region (isotype junction) is created by the implantation of boron ions; the n+-type region, by the diffusion of phosphorus from the gas phase. It is established that on the voltage-current characteristics under reverse bias, three regions of dark cur-rent variation depending on the applied voltage can be distinguished, sublinear, superlinear, and linear, caused by various mechanisms of the generation-recombination processes in the depletion region of the pn-junction. A noticeable dependence of the barrier capacitance value (at a frequency of 1 kHz) and the size of the depletion region on temperature is observed only when the applied reverse voltages do not exceed the contact potential difference (V ≤ 1 V).