Abstract
Structural and compositional parameters of the Hg 1− x Cd x Te layers grown by metal-organic vapor deposition on (2 1 1)-oriented CdTe substrates were investigated by high-resolution X-ray diffraction, high-resolution scanning electron microscopy, energy dispersive spectroscopy in scanning electron microscopy and Fourier transform infra-red spectroscopy in a transmission mode. Divergence in Cd concentrations, obtained by different methods, is explained in terms of extended defects which cause lattice swelling of the Hg 1− x Cd x Te matrix. Strong correlation between defect density and lattice swelling was established by absolute measurements of lattice parameters (Bond method) and by direct defect imaging. It is proposed to use high-resolution Bond technique for nondestructive monitoring of the layer quality.
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