Abstract
A fixed–fixed curved micro-beam resonator under the influence of harmonic electrostatic field is considered. Due to the presence of incompressible fluid between the micro-beams and the electrode, a squeeze-film damping affects the dynamic behavior of the resonator. The combined effect of curved geometry and fluid squeeze-film damping is investigated for micro-beams with concave and convex geometries. A reduced-order model is obtained through the application of Galerkin discretization on a coupled fluid–structure system composed of the nonlinear Euler–Bernoulli beam equation and Burgdorfer’s model for the neighboring fluid. The dynamic behavior is assessed by investigating the influence of squeeze-film damping on the linear and nonlinear frequency response and the maximum resonant deflection of curved up and curved down micro-beams.
Highlights
When manufacturing microelectromechanical systems (MEMS), different etching mechanisms are utilized for removing deposited material on a substrate, leading to the formation of protruded and recessed micro-topographies
When air is squeezed in a micro-gap, it exhibits a damping effect that is proportional to the inverse of the air film thickness, a phenomenon known in the literature as squeeze-film damping (SQFD)
The vibration of curved beam under the effect of SQFD was investigated using the Euler–Bernoulli beam model coupled with the Reynolds equation accounting for a variable effective viscosity
Summary
When manufacturing microelectromechanical systems (MEMS), different etching mechanisms are utilized for removing deposited material on a substrate, leading to the formation of protruded and recessed micro-topographies. Frequency response curves are numerically obtained for the cases of convex and concave micro-beams.
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